Ammonia (NH3) Iso-Butane
(i-C4H10)
Arsenic Pentafluoride (AsF5) Methane (CH4)
Arsenic Trichloride (AsCl3) Molybdenum
Hexafluoride (MoF6)
Arsine (AsH3) Nitrogen Dioxide (NO2)
Boron Trichloride (BCl3) Nitrogen
Oxide (NO)
Carbon Monoxide (CO) Nitrogen
Trifluoride (NF3)
Carbon Tetrachloride (CCl4) Oxygen (O2) 25%
Chlorine (Cl2) Ozone
(O3)
Chlorine Trifluoride (Clf3) Phosphine
(PH3)
Diborane (B2H6) Phosphorous
Oxychloride (POCl3)
Disilane (SiH2CL2) Phosphorous
Pentafluoride (PF5)
Flourine (F2) Phosphorous
Trifluoride (PF3)
Germane (GeH4) Phosphorous
Trichloride (PCl3)
Germane Tetrafluoride (GeF4) Silane (SiH4)
Hydrogen - 1000 ppm (H2) Silicon Tetrachloride
(SiCl4)
Hydrogen Bromide (HBr) Silicon
Tetrafluoride (SiF4)
Hydrogen Chloride (HCl) Silicon
Trichloride (SiHCl3)
Hydrogen Fluoride (HF) Sulfur
Tetrafluoride (SF4)
Hydrogen Selenide (H2Se) Tin Chloride (SnCl4)
Hydrogen Sulfide (H2S) Tungsten
Hexafluoride (WF6)